ZBS-500 vacuum baking equipment can realize thevacuum drying, baking,exhaust and other pretreatment of theshelland chip, and can also realize the workpiece atmosphere(such as nitrogen) or vacuum baking, annealing,oxidation,dehydrogenation and other processes in a clean environment.It issuitable for MEMS, power semiconductor, advanced packaging,optoelectronics and other fields.It can be heated and baked atconstant temperature for along time. The working temperaturecan reach 500℃.It also has excellent temperature uniformityand integrated heating and cooling plate control technology.The equipment has reliable performance, accurate temperaturecontrol, simple maintenance and automatic operation.Theprocess control computer is equipped with touch screen,whichis convenient for users to operate, edit process icon and storeformula.