ZBS-300D vacuum baking equipment can realize thepre-treatment of shell and chip in vacuum, such as drying andexhausting, and realize the process of workpiece atmosphere(such as nitrogen) or vacuum baking, annealing, oxidation anddehydrogenation in a clean environment. Itis suitable for MEMS,power semiconductor, advanced packaging and optoelectronicfields.It can be heated for a long time and baked at constanttemperature. The working temperature can reach 400 ℃,and ithas excellent temperature uniformity.The equipment has reliableperformance, accurate temperature control, simple maintenanceand automatic operation.The process control computer isequipped with touch screen, which is convenient for users tooperate, edit process icon and store formula.